同期论坛 | 半导体核心零部件创新技术论坛，议程及嘉宾阵容抢先看

雷震霖，工学博士，研究员，现任集成电路零部件创新联盟理事长、辽宁省半导体行业协会理事长、真空技术装备国家工程研究中心主任、国家真空仪器装置工程技术研究中心主任。

AI 算力带动全球半导体产线大规模扩张，先进工艺对真空、废气处理等附属装备提出高可靠、低碳化的双重要求。盛剑科技立足二十一年半导体行业积累，发布 SJCP 低温泵、SJPS 集成一体机等系列新品，构建真空泵、低温泵、分子泵、废气处理、温控设备的国产半导体附属装备完整平台。本次演讲剖析半导体装备零部件国产化机遇，介绍全系列自研真空与废气治理产品技术特性，分享面向先进晶圆产线的绿色厂务解决方案与落地实践，赋能国内晶圆制造、先进封装产业发展。

聚焦 ALD 及其他高科技领域，及ALD 设备和 ALD 阀门在中国的主要应用领域。

Focus on ALD and other high-tech topics, key application areas for ALD equipment and ALD valves in China.

1.国产半导体密封圈的市场化进展

2.当前面临的技术与商业挑战

3.下一步发展方向与路径

• 当先进制程进入纳米级时代，污染控制正成为影响良率的重要因素。

• 聚焦湿法清洗、蚀刻、CMP及化学品输送等关键环节的实际挑战。

• 分享过滤与纯化技术在客户量产导入中的应用经验和最佳实践。

• 探讨如何构建从化学品供应到工艺使用端的全流程污染控制体系。

• As semiconductor manufacturing moves deeper into the nanoscale era, contamination control is becoming a key driver of yield.

• Focus on practical challenges in wet cleaning, etch, CMP and chemical delivery systems.

• Share real-world implementation experiences and best practices from production environments.

• Discuss building an end-to-end contamination control strategy from chemical supply to point of use.

重点阐述以数据标准化为底座、以“三账五流”框架为基础、以人工智能为引擎的“全链数据体系”构建路径。

Focusing on how to build a “full-chain data system” with data standardization as the foundation, the Three-Ledger Accounting and Five-Flow Consistency framework as the core structure, and artificial intelligence as the driving engine.

金属喷淋头、硅/碳化硅电极，以及加热盘，作为薄膜和刻蚀设备的核心零部件，在晶圆制造中起着决定性作用。但由于金属与陶瓷不同的材料特性，二者加工工艺与质量管控差异较大。基迈克材料科技在金属、陶瓷靶材生产过程中积累了全面的烧结、加工、表处、喷涂经验，并拓展应用到零部件板块，为客户提供薄膜与刻蚀设备核心部件的全套解决方案。

As core consumables in thin film deposition and etch systems, metal showerheads, Si/SiC up-electrodes, and heaters play a pivotal role in wafer fabrication. However, the divergent material properties between metals and ceramics necessitate distinct machining processes and quality control protocols. Leveraging extensive expertise in sintering, precision machining, surface treatment, and thermal spraying accumulated through the production of metal and ceramic sputtering targets, Gemch has successfully extended these capabilities to the equipment parts. We provide turnkey solutions for critical hardware in thin film and etch equipment, ensuring optimal process performance and reliability.